AGC Chemicals Americas Inc., has added two new grades to its line of perfluoroelastomers. AFLAS® FFKM PM-5000 and FFKM PM-5500 perfluorinated elastomers can be used for semiconductor plasma process applications due to their high temperature durability beyond 300 °C and excellent resistance to O2 and NF3 plasma. They have a high molecular weight that enables greater hardness without using fillers, which can create unwanted particles.
The new nitrile-curable grades build on the high-performance properties of other AFLAS FFKMs. They provide excellent chemical resistance and electrical insulation. These qualities make them suitable for fabricating components that perform in aggressive and sensitive environments.